Shanghai Artificial Intelligence Laboratory, in collaboration with several university partners, has announced the development of a high-purity KrF (krypton fluoride) photoresist resin using an AI-driven synthesis platform. The achievement was reported on May 13, 2026, according to a press release from the lab.
The AI platform optimized the synthesis process, resulting in a resin with high batch consistency, a critical factor for semiconductor manufacturing. The lab stated that the resin meets industry standards for purity and performance, though specific metrics were not disclosed in the initial announcement.
This breakthrough is significant for China's semiconductor supply chain, as photoresist resins are a key material in chip production and have been subject to export controls. The development could reduce reliance on foreign suppliers for this specialized chemical.
The research team plans to scale up production and collaborate with domestic chip manufacturers for further testing. No timeline for commercial availability was provided.
